Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11624879 | Multi-channel optical coupler | Eric B. Grann, Scott Fluegel | 2023-04-11 |
| 6264852 | Substrate process chamber and processing method | Harald Herchen, William R. Brown, Dan Kujaneck | 2001-07-24 |
| 6159297 | Semiconductor process chamber and processing method | Harald Herchen, William R. Brown, Dan Kujaneck | 2000-12-12 |
| 5789322 | Low volume gas distribution assembly for a chemical downstream etch tool | William R. Brown, Harald Herchen, Walter R. Merry | 1998-08-04 |
| 5728260 | Low volume gas distribution assembly and method for a chemical downstream etch tool | William R. Brown, Harald Herchen, Walter R. Merry | 1998-03-17 |