Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 6264852 | Substrate process chamber and processing method | Harald Herchen, William R. Brown, Ihi Nzeadibe | 2001-07-24 | $104,034,000 |
| 6159297 | Semiconductor process chamber and processing method | Harald Herchen, William R. Brown, Ihi Nzeadibe | 2000-12-12 | $55,693,000 |