Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6264852 | Substrate process chamber and processing method | Harald Herchen, William R. Brown, Ihi Nzeadibe | 2001-07-24 |
| 6159297 | Semiconductor process chamber and processing method | Harald Herchen, William R. Brown, Ihi Nzeadibe | 2000-12-12 |