Issued Patents All Time
Showing 101–116 of 116 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7141757 | Plasma reactor with overhead RF source power electrode having a resonance that is virtually pressure independent | Jang-Gyoo Yang, Douglas A. Buchberger, Jr., Douglas H. Burns | 2006-11-28 |
| 7132618 | MERIE plasma reactor with overhead RF electrode tuned to the plasma with arcing suppression | Yan Ye, Dan Katz, Douglas A. Buchberger, Jr., Xiaoye Zhao, Kang-Lie Chiang +2 more | 2006-11-07 |
| 7030335 | Plasma reactor with overhead RF electrode tuned to the plasma with arcing suppression | Gerald Yin, Yan Ye, Dan Katz, Douglas A. Buchberger, Jr., Xiaoye Zhao +3 more | 2006-04-18 |
| 6900596 | Capacitively coupled plasma reactor with uniform radial distribution of plasma | Jang-Gyoo Yang, James D. Carducci, Douglas A. Buchberger, Jr., Matthew L. Miller, Kang-Lie Chiang +2 more | 2005-05-31 |
| 6894245 | Merie plasma reactor with overhead RF electrode tuned to the plasma with arcing suppression | Yan Ye, Dan Katz, Douglas A. Buchberger, Jr., Xiaoye Zhao, Kang-Lie Chiang +2 more | 2005-05-17 |
| 6879870 | Method and apparatus for routing harmonics in a plasma to ground within a plasma enhanced semiconductor wafer processing chamber | Steven C. Shannon, Michael Barnes, Lee LaBlanc | 2005-04-12 |
| 6853141 | Capacitively coupled plasma reactor with magnetic plasma control | Matthew L. Miller, Jang-Gyoo Yang, Heeyeop Chae, Michael Barnes, Tetsuya Ishikawa +1 more | 2005-02-08 |
| 6838635 | Plasma reactor with overhead RF electrode tuned to the plasma | Gerald Yin | 2005-01-04 |
| 6667577 | Plasma reactor with spoke antenna having a VHF mode with the spokes in phase | Steven C. Shannon, Chunshi Cui, Yan Ye, Gerardo Delgadino, Douglas A. Buchberger, Jr. +4 more | 2003-12-23 |
| 6652712 | Inductive antenna for a plasma reactor producing reduced fluorine dissociation | Shiang-Bau Wang, Chunshi Cui, Yan Ye, Gerardo Delgadino, David Brian McParland +3 more | 2003-11-25 |
| 6528751 | Plasma reactor with overhead RF electrode tuned to the plasma | Gerald Yin | 2003-03-04 |
| 6508198 | Automatic tuning in a tapped RF transformer inductive source of a plasma reactor for processing a semiconductor wafer | Peter Loewenhardt, Victor H. Fuentes, Qiwei Liang | 2003-01-21 |
| 6326597 | Temperature control system for process chamber | Dmitry Lubomirsky, Allen D'Ambra, Edward Floyd, Qiwei Liang, Victor H. Fuentes +2 more | 2001-12-04 |
| 5266762 | Method and apparatus for radio frequency ceramic sintering | Harold Dail Kimrey, Jr. | 1993-11-30 |
| 4755345 | Impedance matched, high-power, rf antenna for ion cyclotron resonance heating of a plasma | Frederick W. Baity, Jr., Thomas Llewellyn Owens | 1988-07-05 |
| 4694264 | Radio frequency coaxial feedthrough device | Thomas Llewellyn Owens, Frederick W. Baity, Jr., John H. Whealton | 1987-09-15 |