Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10550464 | Physical vapor deposition method using backside gas cooling of workpieces | Ravi Mullapudi, Harish V. PENMETHSA, Harshal T. Vasa, Srikanth Dasaradhi | 2020-02-04 |
| 9957606 | Physical vapor deposition system using rotating pallet with X and Y positioning | Ravi Mullapudi, Srikanth Dasaradhi, Suresh Palanisamy, Venkata Dora Chowdary Kakarla | 2018-05-01 |
| 6879870 | Method and apparatus for routing harmonics in a plasma to ground within a plasma enhanced semiconductor wafer processing chamber | Steven C. Shannon, Daniel J. Hoffman, Michael Barnes | 2005-04-12 |