| 10550464 |
Physical vapor deposition method using backside gas cooling of workpieces |
Ravi Mullapudi, Harish V. PENMETHSA, Harshal T. Vasa, Lee LaBlanc |
2020-02-04 |
| 9957606 |
Physical vapor deposition system using rotating pallet with X and Y positioning |
Ravi Mullapudi, Lee LaBlanc, Suresh Palanisamy, Venkata Dora Chowdary Kakarla |
2018-05-01 |
| 9932668 |
Physical vapor deposition system using backside gas cooling of workpieces |
Ravi Mullapudi, Harish V. PENMETHSA, Harshal T. Vasa, Lee LeBlanc |
2018-04-03 |
| 8092659 |
Multi-station sputtering and cleaning system |
Ravi Mullapudi, Dean Smith, Edward Strepka |
2012-01-10 |
| 7799190 |
Target backing plate for sputtering system |
Ravi Mullapudi, Dean Smith |
2010-09-21 |
| 7794574 |
Top shield for sputtering system |
Ravi Mullapudi, Dean Smith |
2010-09-14 |
| 7682495 |
Oscillating magnet in sputtering system |
Ravi Mullapudi, Dean Smith |
2010-03-23 |