Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12417903 | Physical vapor deposition source and chamber assembly | Sathiyamurthi GOVINDASAMY, Suresh Palanisamy, Naresh Kumar Asokan, Karunakaran NATARAJ | 2025-09-16 |
| 12249537 | Substrate flipping in vacuum for dual sided PVD sputtering | Suresh Palanisamy, Dinesh Babu Rajamanickam, Naresh Kumar Asokan | 2025-03-11 |
| 12195843 | Multicathode PVD system for high aspect ratio barrier seed deposition | Ming Li | 2025-01-14 |
| 11948784 | Tilted PVD source with rotating pedestal | Hong Yang, Suresh Palanisamy | 2024-04-02 |
| 11881427 | Substrate flipping in vacuum for dual sided PVD sputtering | Suresh Palanisamy, Dinesh Babu Rajamanickam, Naresh Kumar Asokan | 2024-01-23 |
| 10550464 | Physical vapor deposition method using backside gas cooling of workpieces | Ravi Mullapudi, Harshal T. Vasa, Srikanth Dasaradhi, Lee LaBlanc | 2020-02-04 |
| 9932668 | Physical vapor deposition system using backside gas cooling of workpieces | Ravi Mullapudi, Harshal T. Vasa, Srikanth Dasaradhi, Lee LeBlanc | 2018-04-03 |