Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12417903 | Physical vapor deposition source and chamber assembly | Sathiyamurthi GOVINDASAMY, Harish V. PENMETHSA, Suresh Palanisamy, Karunakaran NATARAJ | 2025-09-16 |
| 12249537 | Substrate flipping in vacuum for dual sided PVD sputtering | Harish V. PENMETHSA, Suresh Palanisamy, Dinesh Babu Rajamanickam | 2025-03-11 |
| 11881427 | Substrate flipping in vacuum for dual sided PVD sputtering | Harish V. PENMETHSA, Suresh Palanisamy, Dinesh Babu Rajamanickam | 2024-01-23 |