Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12195855 | Gas-phase reactor system including a gas detector | SungBae Kim, Youngmin Kim, KiKang Kim, Seunghwan Lee | 2025-01-14 |
| 11866823 | Substrate supporting unit and a substrate processing device including the same | Seunghwan Lee, Jongsu Kim, SungBae Kim, JuHyuk Park | 2024-01-09 |
| 11814728 | Method for filling a gap in a three-dimensional structure on a semiconductor substrate | KiKang Kim, HieChul Kim, SungKyu Kang, Seunghwan Lee, SungBae Kim +4 more | 2023-11-14 |
| 11499226 | Substrate supporting unit and a substrate processing device including the same | Seunghwan Lee, Jongsu Kim, SungBae Kim, JuHyuk Park | 2022-11-15 |
| 11453946 | Gas-phase reactor system including a gas detector | SungBae Kim, Youngmin Kim, KiKang Kim, Seunghwan Lee | 2022-09-27 |
| 11345999 | Method of using a gas-phase reactor system including analyzing exhausted gas | SungBae Kim, Youngmin Kim, KiKang Kim, Seunghwan Lee | 2022-05-31 |
| 11251040 | Cyclical deposition method including treatment step and apparatus for same | Seunghwan Lee, KiKang Kim, SungBae Kim, Jonghyun Ahn, SeongRyeong Kim | 2022-02-15 |