Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11814728 | Method for filling a gap in a three-dimensional structure on a semiconductor substrate | KiKang Kim, HakYong Kwon, HieChul Kim, SungKyu Kang, Seunghwan Lee +4 more | 2023-11-14 |
| 11251040 | Cyclical deposition method including treatment step and apparatus for same | Seunghwan Lee, HakYong Kwon, KiKang Kim, SungBae Kim, Jonghyun Ahn | 2022-02-15 |