Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8092659 | Multi-station sputtering and cleaning system | Ravi Mullapudi, Dean Smith, Srikanth Dasaradhi | 2012-01-10 |
| 7744730 | Rotating pallet in sputtering system | Ravi Mullapudi | 2010-06-29 |
| 7479210 | Temperature control of pallet in sputtering system | Ravi Mullapudi, Dean Smith | 2009-01-20 |