Issued Patents 2023
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11823870 | PEALD titanium nitride with direct microwave plasma | Hanhong Chen, Arkaprava Dan, Joseph AuBuchon, Kyoung Ha Kim | 2023-11-21 |
| 11776805 | Selective oxidation and simplified pre-clean | Bencherki Mebarki, Joung Joo Lee, Yi Xu, Yu Lei, Xianmin Tang +2 more | 2023-10-03 |
| 11736818 | Smart camera substrate | Upendra Ummethala, Keith R. Berding, Blake Erickson, Patrick Tae, Devendra Channappa Holeyannavar +4 more | 2023-08-22 |
| 11728124 | Creating ion energy distribution functions (IEDF) | Leonid Dorf, Travis Koh, Olivier Luere, Olivier Joubert, Rajinder Dhindsa +1 more | 2023-08-15 |
| 11721532 | Modular microwave source with local lorentz force | Thai Cheng Chua, Mani Subramani | 2023-08-08 |
| 11691872 | Pore formation in a substrate | Joseph R. Johnson | 2023-07-04 |
| 11670489 | Modular microwave source with embedded ground surface | Joseph AuBuchon, James D. Carducci, Larry D. Elizaga, Richard Fovell, Thai Cheng Chua | 2023-06-06 |
| 11626281 | PEALD nitride films | Hanhong Chen, Joseph AuBuchon | 2023-04-11 |
| 11589474 | Diagnostic disc with a high vacuum and temperature tolerant power source | Phillip Criminale, Zhiqiang Guo, Andrew Myles, Martin Perez-Guzman | 2023-02-21 |
| 11581206 | Capacitive sensor for chamber condition monitoring | Yaoling Pan, Patrick Tae, Leonard Tedeschi, Jennifer Y. Sun, Xiaopu Li +6 more | 2023-02-14 |
| 11564292 | Monolithic modular microwave source with integrated temperature control | James D. Carducci, Richard Fovell, Larry D. Elizaga, Silverst Rodrigues, Thai Cheng Chua | 2023-01-24 |
| 11562909 | Directional selective junction clean with field polymer protections | Yu Lei, Xuesong Lu, Tae Hong Ha, Xianmin Tang, Andrew Nguyen +4 more | 2023-01-24 |
| 11551905 | Resonant process monitor | Yaoling Pan, Vijaykumar Krithivasan, Shimin Mao, Kelvin Chan, Michael D. Willwerth +5 more | 2023-01-10 |