Issued Patents 2020
Showing 1–20 of 20 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10875060 | Method and apparatus for removing debris from collector | Shang-Ying WU, Ming-Hsun Tsai, Sheng-Kang Yu, Yung-Teng Yu, Shang-Chieh Chien +3 more | 2020-12-29 |
| 10880982 | Light generation system using metal-nonmetal compound as precursor and related light generation method | Ching-Hsiang Hsu, Feng Yuan Hsu, Hsu-Kai Chang | 2020-12-29 |
| 10880981 | Collector pellicle | Shang-Chieh Chien, Jen-Yang Chung, Shao-Wei Luo, Tzung-Chi Fu, Chun-Kuang Chen +2 more | 2020-12-29 |
| 10877378 | Vessel for extreme ultraviolet radiation source | Ssu-Yu Chen, Che-Chang Hsu, Shang-Chieh Chien, Li-Jui Chen, Po-Chung Cheng | 2020-12-29 |
| 10877366 | Pressurized tin collection bucket with in-line draining mechanism | Hsin-Feng Chen, Li-Jui Chen | 2020-12-29 |
| 10877190 | Extreme ultraviolet radiation source | Sheng-Ta Lin, Jen-Yang Chung, Shang-Chieh Chien, Li-Jui Chen, Po-Chung Cheng | 2020-12-29 |
| 10875148 | Apparatus and methods for chemical mechanical polishing | He Hui Peng, James Jeng-Jyi Hwang, Yung-Yao Lee, Yen-Di Tsen | 2020-12-29 |
| 10875143 | Apparatus and methods for chemical mechanical polishing | James Jeng-Jyi Hwang, Jiann Lih Wu, He Hui Peng | 2020-12-29 |
| 10857649 | Method and apparatus for performing a polishing process in semiconductor fabrication | Bo-I Lee, Huang Soon Kang, Chin-Hsiang Lin | 2020-12-08 |
| 10859928 | EUV light source and apparatus for lithography | Yu-Chih Chen, Sheng-Kang Yu, Shang-Chieh Chien, Li-Jui Chen, Po-Chung Cheng | 2020-12-08 |
| 10791616 | Radiation source apparatus | Ssu-Yu Chen, Che-Chang Hsu, Shang-Chieh Chien, Li-Jui Chen, Po-Chung Cheng | 2020-09-29 |
| 10763117 | Semiconductor manufacturing apparatus and method thereof | Nai-Han Cheng | 2020-09-01 |
| 10760896 | Ellipsometer and method for estimating thickness of film | Feng Yuan Hsu, Ching-Hsiang Hsu, Chyi Shyuan Chern | 2020-09-01 |
| 10747119 | Apparatus and method for monitoring reflectivity of the collector for extreme ultraviolet radiation source | Yu-Chih Huang, Che-Chang Hsu, Li-Jui Chen, Po-Chung Cheng | 2020-08-18 |
| 10712676 | Radiation source apparatus, EUV lithography system, and method for decreasing debris in EUV lithography system | Ssu-Yu Chen, Shang-Chieh Chien, Chieh Hsieh, Tzung-Chi Fu, Bo-Tsun Liu +2 more | 2020-07-14 |
| 10687410 | Extreme ultraviolet radiation source and cleaning method thereof | Sheng-Ta Lin, Shang-Chieh Chien, Li-Jui Chen, Po-Chung Cheng | 2020-06-16 |
| 10678138 | Extreme ultraviolet (EUV) radiation source and a method for generating extreme ultraviolet radiation | Wei-Chun Yen, Shang-Chieh Chien, Li-Jui Chen, Po-Chung Cheng | 2020-06-09 |
| 10668592 | Method of planarizing a wafer | Bo-I Lee, Soon-Kang Huang, Chin-Hsiang Lin | 2020-06-02 |
| 10541164 | 3D IC bump height metrology APC | Nai-Han Cheng | 2020-01-21 |
| 10527926 | Pressurized tin collection bucket with in-line draining mechanism | Hsin-Feng Chen, Li-Jui Chen | 2020-01-07 |