Issued Patents 2020
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10875060 | Method and apparatus for removing debris from collector | Shang-Ying WU, Ming-Hsun Tsai, Yung-Teng Yu, Chi-Ming Yang, Shang-Chieh Chien +3 more | 2020-12-29 |
| 10879093 | System for a semiconductor fabrication facility and method for operating the same | Fu-Hsien Li, Chi-Feng Tung, Hsiang Yin Shen, Guancyun Li | 2020-12-29 |
| 10871647 | Apparatus and method for prevention of contamination on collector of extreme ultraviolet light source | Kuo-An Liu, Gwan Sin Chang, Bharath Kumar Pulicherla, Li-Jui Chen, Chung-Cheng Wu +1 more | 2020-12-22 |
| 10859928 | EUV light source and apparatus for lithography | Yu-Chih Chen, Chi-Ming Yang, Shang-Chieh Chien, Li-Jui Chen, Po-Chung Cheng | 2020-12-08 |
| 10627728 | Method for creating vacuum in load lock chamber | Tung-Jung Chang, Yu-Fu Lin | 2020-04-21 |
| 10593856 | Mechanical and thermal electric generators | Qiliang Li, Abbas Arab | 2020-03-17 |