Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10792767 | Laser preheating control method and device | Yu-Ting Lu, Jui-Teng Chen, Wen CHANG, Chih-Hung Chou | 2020-10-06 |
| 10684559 | Apparatus and method for cleaning reticle stage | Tung-Jung Chang, Chia-Chen Chen | 2020-06-16 |
| 10627728 | Method for creating vacuum in load lock chamber | Tung-Jung Chang, Sheng-Kang Yu | 2020-04-21 |