Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10684559 | Apparatus and method for cleaning reticle stage | Yu-Fu Lin, Chia-Chen Chen | 2020-06-16 |
| 10627728 | Method for creating vacuum in load lock chamber | Yu-Fu Lin, Sheng-Kang Yu | 2020-04-21 |