Issued Patents 2020
Showing 1–19 of 19 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10880981 | Collector pellicle | Chi-Ming Yang, Jen-Yang Chung, Shao-Wei Luo, Tzung-Chi Fu, Chun-Kuang Chen +2 more | 2020-12-29 |
| 10877378 | Vessel for extreme ultraviolet radiation source | Ssu-Yu Chen, Che-Chang Hsu, Chi-Ming Yang, Li-Jui Chen, Po-Chung Cheng | 2020-12-29 |
| 10877190 | Extreme ultraviolet radiation source | Chi-Ming Yang, Sheng-Ta Lin, Jen-Yang Chung, Li-Jui Chen, Po-Chung Cheng | 2020-12-29 |
| 10875060 | Method and apparatus for removing debris from collector | Shang-Ying WU, Ming-Hsun Tsai, Sheng-Kang Yu, Yung-Teng Yu, Chi-Ming Yang +3 more | 2020-12-29 |
| 10871719 | EUV metal droplet catchers | Sheng-Ta Lin, Po-Chung Cheng, Li-Jui Chen | 2020-12-22 |
| 10859928 | EUV light source and apparatus for lithography | Yu-Chih Chen, Sheng-Kang Yu, Chi-Ming Yang, Li-Jui Chen, Po-Chung Cheng | 2020-12-08 |
| 10859918 | Semiconductor apparatus and method of operating the same | Kuan-Hung Chen, Chieh Hsieh, Li-Jui Chen, Po-Chung Cheng | 2020-12-08 |
| 10842009 | System and method for extreme ultraviolet source control | Chun-Chia Hsu, Chieh Hsieh, Li-Jui Chen, Po-Chung Cheng, Tzung-Chi Fu +1 more | 2020-11-17 |
| 10824083 | Light source, EUV lithography system, and method for generating EUV radiation | Chi YANG, Ssu-Yu Chen, Chieh Hsieh, Tzung-Chi Fu, Bo-Tsun Liu +2 more | 2020-11-03 |
| 10802406 | Apparatus and method for generating extreme ultraviolet radiation | Chieh Hsieh, Kuan-Hung Chen, Chun-Chia Hsu, Liu Bo-Tsun, Li-Jui Chen +1 more | 2020-10-13 |
| 10802405 | Radiation source for lithography exposure process | Chieh Hsieh, Li-Jui Chen, Po-Chung Cheng | 2020-10-13 |
| 10791616 | Radiation source apparatus | Ssu-Yu Chen, Chi-Ming Yang, Che-Chang Hsu, Li-Jui Chen, Po-Chung Cheng | 2020-09-29 |
| 10725384 | Communication control method | Chao-Chen Chang, Shao-Wei Luo, Li-Jui Chen, Po-Chung Cheng | 2020-07-28 |
| 10718718 | EUV vessel inspection method and related system | Chun-Lin Chang, Shang-Ying WU, Li-Kai Cheng, Tzung-Chi Fu, Bo-Tsun Liu +4 more | 2020-07-21 |
| 10712676 | Radiation source apparatus, EUV lithography system, and method for decreasing debris in EUV lithography system | Chi-Ming Yang, Ssu-Yu Chen, Chieh Hsieh, Tzung-Chi Fu, Bo-Tsun Liu +2 more | 2020-07-14 |
| 10685846 | Semiconductor integrated circuit fabrication with pattern-reversing process | Ming-Chin Chien, Jui-Ching Wu, Shu-Hao Chang, Jen-Yang Chung, Kuo-Chang Kau +1 more | 2020-06-16 |
| 10687410 | Extreme ultraviolet radiation source and cleaning method thereof | Chi-Ming Yang, Sheng-Ta Lin, Li-Jui Chen, Po-Chung Cheng | 2020-06-16 |
| 10678138 | Extreme ultraviolet (EUV) radiation source and a method for generating extreme ultraviolet radiation | Wei-Chun Yen, Chi-Ming Yang, Li-Jui Chen, Po-Chung Cheng | 2020-06-09 |
| 10656539 | Radiation source for lithography process | Shang-Ying WU, Bo-Tsun Liu, Li-Jui Chen, Po-Chung Cheng | 2020-05-19 |