Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10852191 | Light source system and polarization angle adjusting method | Jen-Hao Yeh, Han-Lung Chang, Li-Jui Chen, Po-Chung Cheng | 2020-12-01 |
| 10718718 | EUV vessel inspection method and related system | Shang-Chieh Chien, Shang-Ying WU, Li-Kai Cheng, Tzung-Chi Fu, Bo-Tsun Liu +4 more | 2020-07-21 |
| 10697084 | High resistance virtual anode for electroplating cell | Po-Wei Wang | 2020-06-30 |