Issued Patents 2020
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10880980 | EUV light source and apparatus for EUV lithography | Wei-Shin Cheng, Li-Jui Chen, Po-Chung Cheng, Hsiao-Lun Chang | 2020-12-29 |
| 10852191 | Light source system and polarization angle adjusting method | Jen-Hao Yeh, Chun-Lin Chang, Li-Jui Chen, Po-Chung Cheng | 2020-12-01 |
| 10795264 | Light source for lithography exposure process | Hsin-Feng Chen, Li-Jui Chen, Bo-Tsun Liu | 2020-10-06 |
| 10779387 | Extreme ultraviolet photolithography system and method | Ming-Hsun Tsai, Yen-Hsun Chen, Shao-Hua Wang, Li-Jui Chen, Po-Chung Cheng | 2020-09-15 |
| 10719020 | Droplet generator and method of servicing extreme ultraviolet radiation source apparatus | Yen-Hsun Chen, Ming-Hsun Tsai, Shao-Hua Wang, Li-Jui Chen, Chia-Chen Chen | 2020-07-21 |
| 10670970 | Lithography system and method thereof | Wei-Shin Cheng, Hsin-Feng Chen, Cheng-Hao LAI, Shao-Hua Wang, Li-Jui Chen +1 more | 2020-06-02 |