Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10880980 | EUV light source and apparatus for EUV lithography | Wei-Shin Cheng, Han-Lung Chang, Li-Jui Chen, Po-Chung Cheng | 2020-12-29 |
| 10802394 | Method for discharging static charges on reticle | Chueh-Chi Kuo, Tsung-Yen Lee, Tzung-Chi Fu, Li-Jui Chen, Po-Chung Cheng +1 more | 2020-10-13 |