Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10880980 | EUV light source and apparatus for EUV lithography | Han-Lung Chang, Li-Jui Chen, Po-Chung Cheng, Hsiao-Lun Chang | 2020-12-29 |
| 10670970 | Lithography system and method thereof | Hsin-Feng Chen, Cheng-Hao LAI, Shao-Hua Wang, Han-Lung Chang, Li-Jui Chen +1 more | 2020-06-02 |