Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10802394 | Method for discharging static charges on reticle | Hsiao-Lun Chang, Tsung-Yen Lee, Tzung-Chi Fu, Li-Jui Chen, Po-Chung Cheng +1 more | 2020-10-13 |
| 10714371 | Method and apparatus for lithography in semiconductor fabrication | Tsung-Yen Lee, Chia-Hsin CHOU, Tzung-Chi Fu, Li-Jui Chen, Po-Chung Cheng +1 more | 2020-07-14 |