Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10802394 | Method for discharging static charges on reticle | Hsiao-Lun Chang, Chueh-Chi Kuo, Tzung-Chi Fu, Li-Jui Chen, Po-Chung Cheng +1 more | 2020-10-13 |
| 10714371 | Method and apparatus for lithography in semiconductor fabrication | Chueh-Chi Kuo, Chia-Hsin CHOU, Tzung-Chi Fu, Li-Jui Chen, Po-Chung Cheng +1 more | 2020-07-14 |
| 10684561 | Lithography method | Hao-Yu Lan, Po-Chung Cheng, Ching-Juinn Huang, Tzung-Chi Fu | 2020-06-16 |