Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10684561 | Lithography method | Hao-Yu Lan, Po-Chung Cheng, Tzung-Chi Fu, Tsung-Yen Lee | 2020-06-16 |
| 10678148 | Lithography system and lithography method | Kai-Chieh Chang, Tsung-Hsun Lee, Li-Jui Chen, Po-Chung Cheng | 2020-06-09 |
| 10663871 | Reticle stage and method for using the same | Chia-Yu Lee, Tao Chen, Chia-Hao Hsu, Po-Chung Cheng | 2020-05-26 |