Issued Patents 2020
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10787078 | Touch knob and device using same | Nai-Hau Shiue, Yen-Heng Huang, Yen-Chang Yao, Li-Chun Hsu, Chih-Chiang Lin +1 more | 2020-09-29 |
| 10779387 | Extreme ultraviolet photolithography system and method | Ming-Hsun Tsai, Han-Lung Chang, Shao-Hua Wang, Li-Jui Chen, Po-Chung Cheng | 2020-09-15 |
| 10719020 | Droplet generator and method of servicing extreme ultraviolet radiation source apparatus | Ming-Hsun Tsai, Shao-Hua Wang, Han-Lung Chang, Li-Jui Chen, Chia-Chen Chen | 2020-07-21 |
| 10684009 | Method and apparatus for controlling exhaust pressure for an extreme ultraviolet generation chamber | Ming-Hsun Tsai, Ping-Cheng Li | 2020-06-16 |