Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10875060 | Method and apparatus for removing debris from collector | Ming-Hsun Tsai, Sheng-Kang Yu, Yung-Teng Yu, Chi-Ming Yang, Shang-Chieh Chien +3 more | 2020-12-29 |
| 10718718 | EUV vessel inspection method and related system | Chun-Lin Chang, Shang-Chieh Chien, Li-Kai Cheng, Tzung-Chi Fu, Bo-Tsun Liu +4 more | 2020-07-21 |
| 10656539 | Radiation source for lithography process | Shang-Chieh Chien, Bo-Tsun Liu, Li-Jui Chen, Po-Chung Cheng | 2020-05-19 |