Issued Patents 2020
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10859918 | Semiconductor apparatus and method of operating the same | Kuan-Hung Chen, Shang-Chieh Chien, Li-Jui Chen, Po-Chung Cheng | 2020-12-08 |
| 10842009 | System and method for extreme ultraviolet source control | Chun-Chia Hsu, Shang-Chieh Chien, Li-Jui Chen, Po-Chung Cheng, Tzung-Chi Fu +1 more | 2020-11-17 |
| 10824083 | Light source, EUV lithography system, and method for generating EUV radiation | Chi YANG, Ssu-Yu Chen, Shang-Chieh Chien, Tzung-Chi Fu, Bo-Tsun Liu +2 more | 2020-11-03 |
| 10802405 | Radiation source for lithography exposure process | Shang-Chieh Chien, Li-Jui Chen, Po-Chung Cheng | 2020-10-13 |
| 10802406 | Apparatus and method for generating extreme ultraviolet radiation | Kuan-Hung Chen, Chun-Chia Hsu, Shang-Chieh Chien, Liu Bo-Tsun, Li-Jui Chen +1 more | 2020-10-13 |
| 10712676 | Radiation source apparatus, EUV lithography system, and method for decreasing debris in EUV lithography system | Chi-Ming Yang, Ssu-Yu Chen, Shang-Chieh Chien, Tzung-Chi Fu, Bo-Tsun Liu +2 more | 2020-07-14 |