Issued Patents 2020
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10877378 | Vessel for extreme ultraviolet radiation source | Che-Chang Hsu, Chi-Ming Yang, Shang-Chieh Chien, Li-Jui Chen, Po-Chung Cheng | 2020-12-29 |
| 10824083 | Light source, EUV lithography system, and method for generating EUV radiation | Chi YANG, Shang-Chieh Chien, Chieh Hsieh, Tzung-Chi Fu, Bo-Tsun Liu +2 more | 2020-11-03 |
| 10791616 | Radiation source apparatus | Chi-Ming Yang, Che-Chang Hsu, Shang-Chieh Chien, Li-Jui Chen, Po-Chung Cheng | 2020-09-29 |
| 10712676 | Radiation source apparatus, EUV lithography system, and method for decreasing debris in EUV lithography system | Chi-Ming Yang, Shang-Chieh Chien, Chieh Hsieh, Tzung-Chi Fu, Bo-Tsun Liu +2 more | 2020-07-14 |