Issued Patents 2020
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10877378 | Vessel for extreme ultraviolet radiation source | Ssu-Yu Chen, Chi-Ming Yang, Shang-Chieh Chien, Li-Jui Chen, Po-Chung Cheng | 2020-12-29 |
| 10802394 | Method for discharging static charges on reticle | Hsiao-Lun Chang, Chueh-Chi Kuo, Tsung-Yen Lee, Tzung-Chi Fu, Li-Jui Chen +1 more | 2020-10-13 |
| 10791616 | Radiation source apparatus | Ssu-Yu Chen, Chi-Ming Yang, Shang-Chieh Chien, Li-Jui Chen, Po-Chung Cheng | 2020-09-29 |
| 10747119 | Apparatus and method for monitoring reflectivity of the collector for extreme ultraviolet radiation source | Yu-Chih Huang, Chi-Ming Yang, Li-Jui Chen, Po-Chung Cheng | 2020-08-18 |
| 10714371 | Method and apparatus for lithography in semiconductor fabrication | Chueh-Chi Kuo, Tsung-Yen Lee, Chia-Hsin CHOU, Tzung-Chi Fu, Li-Jui Chen +1 more | 2020-07-14 |