Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10842009 | System and method for extreme ultraviolet source control | Chieh Hsieh, Shang-Chieh Chien, Li-Jui Chen, Po-Chung Cheng, Tzung-Chi Fu +1 more | 2020-11-17 |
| 10802406 | Apparatus and method for generating extreme ultraviolet radiation | Chieh Hsieh, Kuan-Hung Chen, Shang-Chieh Chien, Liu Bo-Tsun, Li-Jui Chen +1 more | 2020-10-13 |
| 10563026 | Heat-shrinkable polyester film | Li-Ling Chang, Shu-Chuan Lee, Roy Wu | 2020-02-18 |