Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10877190 | Extreme ultraviolet radiation source | Chi-Ming Yang, Sheng-Ta Lin, Shang-Chieh Chien, Li-Jui Chen, Po-Chung Cheng | 2020-12-29 |
| 10880981 | Collector pellicle | Shang-Chieh Chien, Chi-Ming Yang, Shao-Wei Luo, Tzung-Chi Fu, Chun-Kuang Chen +2 more | 2020-12-29 |
| 10685846 | Semiconductor integrated circuit fabrication with pattern-reversing process | Ming-Chin Chien, Jui-Ching Wu, Shu-Hao Chang, Shang-Chieh Chien, Kuo-Chang Kau +1 more | 2020-06-16 |