Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10877190 | Extreme ultraviolet radiation source | Chi-Ming Yang, Jen-Yang Chung, Shang-Chieh Chien, Li-Jui Chen, Po-Chung Cheng | 2020-12-29 |
| 10871719 | EUV metal droplet catchers | Po-Chung Cheng, Li-Jui Chen, Shang-Chieh Chien | 2020-12-22 |
| 10687410 | Extreme ultraviolet radiation source and cleaning method thereof | Chi-Ming Yang, Shang-Chieh Chien, Li-Jui Chen, Po-Chung Cheng | 2020-06-16 |