Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10859928 | EUV light source and apparatus for lithography | Sheng-Kang Yu, Chi-Ming Yang, Shang-Chieh Chien, Li-Jui Chen, Po-Chung Cheng | 2020-12-08 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10859928 | EUV light source and apparatus for lithography | Sheng-Kang Yu, Chi-Ming Yang, Shang-Chieh Chien, Li-Jui Chen, Po-Chung Cheng | 2020-12-08 |