Issued Patents 2020
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10879093 | System for a semiconductor fabrication facility and method for operating the same | Sheng-Kang Yu, Chi-Feng Tung, Hsiang Yin Shen, Guancyun Li | 2020-12-29 |
| 10861692 | Substrate carrier deterioration detection and repair | Jen-Ti Wang, Chih-Wei Lin, Yi-Ming Chen, Cheng-Ho Hung | 2020-12-08 |
| 10840121 | Method and apparatus for unpacking semiconductor wafer container | Chi-Feng Tung, Chi-Yuan Chu, Jen-Ti Wang, Hsiang Yin Shen | 2020-11-17 |
| 10703563 | Stocker | Guan-Cyun Li, Chi-Feng Tung, Hsiang Yin Shen | 2020-07-07 |
| 10618534 | Monitor vehicle for a rail system and method thereof | Shih-Hung Chien, Jen-Ti Wang, Chih-Hung Liu, Yung-Lin Hsu | 2020-04-14 |