Issued Patents 2020
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10867823 | Fault detection method in semiconductor fabrication | Chun-Jung Huang, Yung-Lin Hsu, Kuang-Huan Hsu, Wei-Chih Chen, Chih-Hung Liu | 2020-12-15 |
| 10861692 | Substrate carrier deterioration detection and repair | Chih-Wei Lin, Fu-Hsien Li, Yi-Ming Chen, Cheng-Ho Hung | 2020-12-08 |
| 10840121 | Method and apparatus for unpacking semiconductor wafer container | Fu-Hsien Li, Chi-Feng Tung, Chi-Yuan Chu, Hsiang Yin Shen | 2020-11-17 |
| 10804124 | Wafer processing tool capable of detecting wafer warpage and method for detecting wafer warpage | Chao-Hsiung Yeh, Hsuan Chang, Chin-Tsan Chen, Kuo-Fong Chuang | 2020-10-13 |
| 10618534 | Monitor vehicle for a rail system and method thereof | Shih-Hung Chien, Fu-Hsien Li, Chih-Hung Liu, Yung-Lin Hsu | 2020-04-14 |