Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10871647 | Apparatus and method for prevention of contamination on collector of extreme ultraviolet light source | Kuo-An Liu, Bharath Kumar Pulicherla, Li-Jui Chen, Sheng-Kang Yu, Chung-Cheng Wu +1 more | 2020-12-22 |
| 10720514 | Semiconductor device and manufacturing method thereof | Chih-Hao Wang, Wai-Yi Lien, Yu-Ming Lin, Ching Hsueh, Jia-Chuan You +1 more | 2020-07-21 |
| 10629737 | Method for fabricating FinFET including forming an oxide layer | Chih-Hao Wang, Kuo-Cheng Ching, Zhiqiang Wu | 2020-04-21 |