Issued Patents 2020
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10875148 | Apparatus and methods for chemical mechanical polishing | He Hui Peng, James Jeng-Jyi Hwang, Chi-Ming Yang, Yen-Di Tsen | 2020-12-29 |
| 10867872 | Method and apparatus for manufacturing semiconductor structure | Wei-Hsiang Tseng | 2020-12-15 |
| 10831110 | Lithographic overlay correction and lithographic process | Ai-Jen Hung, Heng-Hsin Liu, Chin-Chen Wang, Ying-Ying Wang | 2020-11-10 |
| 10792697 | Drippage prevention system and method of operating same | Chien-Hung Wang, Chun-Chih Lin, Chi-Hung Liao, Wei Chang Cheng | 2020-10-06 |
| 10747128 | Exposure method and exposure apparatus | Heng-Hsin Liu, Hung-Ming Kuo, Jui-Chun Peng | 2020-08-18 |
| 10691020 | Apparatus for dispensing liquid material and method for fabricating semiconductor device | Chen Yi Hsu | 2020-06-23 |