Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10875143 | Apparatus and methods for chemical mechanical polishing | James Jeng-Jyi Hwang, Jiann Lih Wu, Chi-Ming Yang | 2020-12-29 |
| 10875148 | Apparatus and methods for chemical mechanical polishing | James Jeng-Jyi Hwang, Chi-Ming Yang, Yung-Yao Lee, Yen-Di Tsen | 2020-12-29 |
| 10847359 | Method for metal gate surface clean | Shich-Chang Suen, Li-Chieh Wu, Chi-Jen Liu, Liang-Guang Chen, Yung-Chung Chen | 2020-11-24 |