Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10847359 | Method for metal gate surface clean | Li-Chieh Wu, Chi-Jen Liu, He Hui Peng, Liang-Guang Chen, Yung-Chung Chen | 2020-11-24 |
| 10755934 | Systems and methods for chemical mechanical polish and clean | Chi-Jen Liu, Ying-Liang Chuang, Li-Chieh Wu, Liang-Guang Chen, Ming-Liang Yen | 2020-08-25 |