Issued Patents 2020
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10847359 | Method for metal gate surface clean | Shich-Chang Suen, Li-Chieh Wu, Chi-Jen Liu, He Hui Peng, Yung-Chung Chen | 2020-11-24 |
| 10755934 | Systems and methods for chemical mechanical polish and clean | Shich-Chang Suen, Chi-Jen Liu, Ying-Liang Chuang, Li-Chieh Wu, Ming-Liang Yen | 2020-08-25 |
| 10692732 | CMP slurry and CMP method | Chun-Wei Hsu, Chi-Jen Liu, Kei-Wei Chen, William Weilun Hong, Chi-Hsiang Shen +2 more | 2020-06-23 |
| 10636701 | Methods of forming semiconductor devices using multiple planarization processes | Chun-Wei Hsu, Ling-Fu Nieh, Pinlei Edmund Chu, Chi-Jen Liu, Yi-Sheng Lin +2 more | 2020-04-28 |