Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10875143 | Apparatus and methods for chemical mechanical polishing | Jiann Lih Wu, He Hui Peng, Chi-Ming Yang | 2020-12-29 |
| 10875148 | Apparatus and methods for chemical mechanical polishing | He Hui Peng, Chi-Ming Yang, Yung-Yao Lee, Yen-Di Tsen | 2020-12-29 |
| 10866519 | Reticle-masking structure, extreme ultraviolet apparatus, and method of forming the same | Ching-Hsiang Hsu, Feng Yuan Hsu | 2020-12-15 |