Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10880982 | Light generation system using metal-nonmetal compound as precursor and related light generation method | Ching-Hsiang Hsu, Hsu-Kai Chang, Chi-Ming Yang | 2020-12-29 |
| 10866519 | Reticle-masking structure, extreme ultraviolet apparatus, and method of forming the same | Ching-Hsiang Hsu, James Jeng-Jyi Hwang | 2020-12-15 |
| 10760896 | Ellipsometer and method for estimating thickness of film | Chi-Ming Yang, Ching-Hsiang Hsu, Chyi Shyuan Chern | 2020-09-01 |