Issued Patents 2020
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10792697 | Drippage prevention system and method of operating same | Chien-Hung Wang, Chun-Chih Lin, Chi-Hung Liao, Yung-Yao Lee | 2020-10-06 |
| 10678133 | Method for forming photoresist layer | Chi-Hung Liao | 2020-06-09 |
| 10670540 | Photolithography method and photolithography system | Chi-Hung Liao | 2020-06-02 |
| 10618085 | Apparatus and methods for exhaust cleaning | Cheng-Kuang Chen, Chi-Hung Liao | 2020-04-14 |