Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10831110 | Lithographic overlay correction and lithographic process | Ai-Jen Hung, Yung-Yao Lee, Chin-Chen Wang, Ying-Ying Wang | 2020-11-10 |
| 10747128 | Exposure method and exposure apparatus | Yung-Yao Lee, Hung-Ming Kuo, Jui-Chun Peng | 2020-08-18 |