Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10784079 | Ion implantation system and source bushing thereof | Ying Meng, Chui-Ya Peng | 2020-09-22 |
| 10763117 | Semiconductor manufacturing apparatus and method thereof | Chi-Ming Yang | 2020-09-01 |
| 10541164 | 3D IC bump height metrology APC | Chi-Ming Yang | 2020-01-21 |