Issued Patents 2019
Showing 1–25 of 33 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10522404 | Fully self-aligned via | Ying Zhang, Regina Freed, Nitin K. Ingle, Uday Mitra, Ho-yung David Hwang | 2019-12-31 |
| 10510602 | Methods of producing self-aligned vias | Ying Zhang, Yung-Chen Lin, Qingjun Zhou, He Ren, Ho-yung David Hwang +1 more | 2019-12-17 |
| 10510589 | Cyclic conformal deposition/anneal/etch for Si gapfill | Rui Cheng, Yi Yang | 2019-12-17 |
| 10510546 | Schemes for selective deposition for patterning applications | Atashi Basu | 2019-12-17 |
| 10490411 | Method for enabling self-aligned lithography on metal contacts and selective deposition using free-standing vertical carbon structures | Kurtis Leschkies, Steven Verhaverbeke, Ziqing Duan | 2019-11-26 |
| 10480066 | Metal deposition methods | Yong Wu, Srinivas Gandikota | 2019-11-19 |
| 10483102 | Surface modification to improve amorphous silicon gapfill | Pramit Manna, Shishi Jiang | 2019-11-19 |
| 10480074 | Apparatus for radical-based deposition of dielectric films | Jianhua Zhou, Juan Carlos Rocha-Alvarez, Yihong Chen, Oscar Lopez, Ningli Liu | 2019-11-19 |
| 10475642 | Doped and undoped vanadium oxides for low-k spacer applications | Eswaranand Venkatasubramanian, Srinivas Gandikota, Kelvin Chan, Atashi Basu | 2019-11-12 |
| 10460933 | Two-step process for gapfilling high aspect ratio trenches with amorphous silicon film | Pramit Manna, Shishi Jiang, Rui Cheng | 2019-10-29 |
| 10460936 | Photo-assisted deposition of flowable films | Brian Saxton Underwood, Mukund Srinivasan, Juan Carlos Rocha-Alvarez | 2019-10-29 |
| 10424507 | Fully self-aligned via | Ying Zhang, Regina Freed, Nitin K. Ingle, Uday Mitra, Ho-yung David Hwang | 2019-09-24 |
| 10410864 | Hybrid carbon hardmask for lateral hardmask recess reduction | Thomas Jongwan Kwon, Rui Cheng, Er-Xuan Ping, Jaesoo Ahn | 2019-09-10 |
| 10410865 | Methods of forming self-aligned vias | David Thompson, Benjamin Schmiege, Jeffrey W. Anthis, Susmit Singha Roy, Ziqing Duan +3 more | 2019-09-10 |
| 10410869 | CVD based oxide-metal multi structure for 3D NAND memory devices | Susmit Singha Roy, Kelvin Chan, Hien Minh Le, Sanjay Kamath, Srinivas Gandikota +1 more | 2019-09-10 |
| 10410872 | Borane mediated dehydrogenation process from silane and alkylsilane species for spacer and hardmask application | Rui Cheng, Ziqing Duan, Milind Gadre, Praket P. Jha, Deenesh Padhi | 2019-09-10 |
| 10410921 | Fully self-aligned via | Ying Zhang, Regina Freed, Nitin K. Ingle, Uday Mitra, Ho-yung David Hwang | 2019-09-10 |
| 10403542 | Methods of forming self-aligned vias and air gaps | Susmit Singha Roy, Ziqing Duan, Praburam Gopalraja | 2019-09-03 |
| 10403502 | Boron doped tungsten carbide for hardmask applications | Eswaranand Venkatasubramanian, Susmit Singha Roy, Takehito Koshizawa | 2019-09-03 |
| 10354916 | Methods for wordline separation in 3D-NAND devices | Yihong Chen, Ziqing Duan, Kelvin Chan | 2019-07-16 |
| 10347488 | Titanium compound based hard mask films | Rui Cheng, Wei V. Tang, Pramit Manna, Srinivas Gandikota | 2019-07-09 |
| 10347495 | Schemes for selective deposition for patterning applications | Atashi Basu | 2019-07-09 |
| 10319591 | Geometric control of bottom-up pillars for patterning applications | Ziqing Duan | 2019-06-11 |
| 10319636 | Deposition and treatment of films for patterning | Atashi Basu, Ziqing Duan, Srinivas Gandikota | 2019-06-11 |
| 10319624 | Oxidative volumetric expansion of metals and metal containing compounds | Susmit Singha Roy, Yihong Chen, Kelvin Chan, Srinivas Gandikota, Pramit Manna | 2019-06-11 |