Issued Patents 2019
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10480074 | Apparatus for radical-based deposition of dielectric films | Jianhua Zhou, Juan Carlos Rocha-Alvarez, Yihong Chen, Abhijit Basu Mallick, Oscar Lopez | 2019-11-19 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10480074 | Apparatus for radical-based deposition of dielectric films | Jianhua Zhou, Juan Carlos Rocha-Alvarez, Yihong Chen, Abhijit Basu Mallick, Oscar Lopez | 2019-11-19 |