Issued Patents 2019
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10497606 | Dual-zone heater for plasma processing | Xing Lin, Juan Carlos Rocha-Alvarez, Ramprakash Sankarakrishnan | 2019-12-03 |
| 10480077 | PEALD apparatus to enable rapid cycling | Dale R. Du Bois, Juan Carlos Rocha-Alvarez | 2019-11-19 |
| 10480074 | Apparatus for radical-based deposition of dielectric films | Juan Carlos Rocha-Alvarez, Yihong Chen, Abhijit Basu Mallick, Oscar Lopez, Ningli Liu | 2019-11-19 |
| 10450653 | High impedance RF filter for heater with impedance tuning device | Jian J. Chen, Mohamad A. Ayoub, Juan Carlos Rocha-Alvarez, Zheng John Ye, Ramprakash Sankarakrishnan | 2019-10-22 |
| 10403515 | Loadlock integrated bevel etcher system | Saptarshi Basu, Jeongmin Lee, Paul Connors, Dale R. Du Bois, Prashant Kumar Kulshreshtha +12 more | 2019-09-03 |
| 10403535 | Method and apparatus of processing wafers with compressive or tensile stress at elevated temperatures in a plasma enhanced chemical vapor deposition system | Zheng John Ye, Jay D. Pinson, II, Hiroji Hanawa, Xing Lin, Ren-Guan Duan +11 more | 2019-09-03 |
| 10385448 | Apparatus and method for purging gaseous compounds | Juan Carlos Rocha-Alvarez, Amit Kumar BANSAL, Ganesh Balasubramanian, Ramprakash Sankarakrishnan | 2019-08-20 |
| 10325799 | Dual temperature heater | Dale R. Du Bois, Juan Carlos Rocha-Alvarez, Sanjeev Baluja, Ganesh Balasubramanian, Lipyeow Yap +1 more | 2019-06-18 |
| 10310930 | Solid state disk using method and apparatus | — | 2019-06-04 |
| 10266943 | Plasma corrosion resistive heater for high temperature processing | Abdul Aziz Khaja, Ren-Guan Duan, Amit Kumar BANSAL, Juan Carlos Rocha-Alvarez | 2019-04-23 |
| 10261906 | Data accessing method and apparatus | Yan Li, Po Zhang, Fei Wang | 2019-04-16 |