Issued Patents 2019
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10480068 | Chamber liner for high temperature processing | Sanjeev Baluja, Kalyanjit Ghosh | 2019-11-19 |
| 10403535 | Method and apparatus of processing wafers with compressive or tensile stress at elevated temperatures in a plasma enhanced chemical vapor deposition system | Zheng John Ye, Jay D. Pinson, II, Hiroji Hanawa, Jianhua Zhou, Xing Lin +11 more | 2019-09-03 |
| 10364197 | Heat treated ceramic substrate having ceramic coating | Jennifer Y. Sun, Biraja P. Kanungo, Dmitry Lubomirsky | 2019-07-30 |
| 10336656 | Ceramic article with reduced surface defect density | Thorsten Lill, Jennifer Y. Sun, Benjamin Schwarz | 2019-07-02 |
| 10266943 | Plasma corrosion resistive heater for high temperature processing | Abdul Aziz Khaja, Amit Kumar BANSAL, Jianhua Zhou, Juan Carlos Rocha-Alvarez | 2019-04-23 |
| 10242888 | Semiconductor processing apparatus with a ceramic-comprising surface which exhibits fracture toughness and halogen plasma resistance | Jennifer Y. Sun, Jie Yuan, Li Xu, Kenneth S. Collins | 2019-03-26 |