Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10460915 | Rotatable substrate support having radio frequency applicator | Satoru Kobayashi, Kirby H. Floyd, Soonam Park, Dmitry Lubomirsky | 2019-10-29 |
| 10403535 | Method and apparatus of processing wafers with compressive or tensile stress at elevated temperatures in a plasma enhanced chemical vapor deposition system | Zheng John Ye, Jay D. Pinson, II, Jianhua Zhou, Xing Lin, Ren-Guan Duan +11 more | 2019-09-03 |