Issued Patents 2019
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10497606 | Dual-zone heater for plasma processing | Jianhua Zhou, Juan Carlos Rocha-Alvarez, Ramprakash Sankarakrishnan | 2019-12-03 |
| 10403535 | Method and apparatus of processing wafers with compressive or tensile stress at elevated temperatures in a plasma enhanced chemical vapor deposition system | Zheng John Ye, Jay D. Pinson, II, Hiroji Hanawa, Jianhua Zhou, Ren-Guan Duan +11 more | 2019-09-03 |